| Category: | Lithographie |
| Location: | IMSEAM |
| Group: | IMSEAM Core Facility |
| URL: | https://www.imseam.uni-heidelberg.de/en/core-facilities/imseam-core-facility/cleanroom |
| Contact: | Stefan Kauschke activate javascript to see email address |
| Technical Information: | The Raith eLINE Plus is a modularly expandable tool for advanced electron-beam lithography. It enables tailored fabrication of nano- and microstructures as well as ultra-high resolution imaging. Stitch-free fabrication of structures with dimensions of few tens of nanometers in arrays of up to 90 millimeters is possible with high reproducibility. |
| Access Information: | Access via the IMSEAM Core Facility (ICF) |
