
| Category: | Lithographie |
| Location: | IMSEAM |
| Group: | Blasco group |
| Contact: | Eva Blasco activate javascript to see email address |
| Technical Information: | 3D laser lithography device (780 nm wavelength), Lateral resolution: 500 nm, Vertical resolution: 500 nm, 3D lateral feature size: 200 nm. |
| Access Information: | Please contact Prof. Dr. Eva Blasco. |